News release - Imec to install high NA EUV imaging and
https://www.imec-int.com/en/articles/imec-to-install-high-na-euv-imaging-and-attosecond-analytical-lab-to-probe-lithography-down-to-8nm-pitch
Feb 26, 2019 . SAN FRANCISCO (US), FEBRUARY 26, 2019 — Today, imec, a world-leading research and innovation hub in nanoelectronics and digital technologies, and KMLabs, pioneers and world leaders in ultrafast laser and EUV technology, announce a joint development to create a real-time functional imaging and interference lithography laboratory. This lab will enable …
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